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Author
8
Logothetidis, S.
8
Patsalas, P.
6
Gioti, M.
3
Beltsios, K.
3
Raptis, I.
2
Charitidis, C.
2
Galdikas, A.
2
Gogolides, E.
2
Pranevicius, L.
2
Tortai, J. H.
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Subject
6
thin-films
3
amorphous carbon
3
diamond
3
spectroscopic ellipsometry
3
sputtering
2
amorphous-carbon
2
interferometry
2
lithography
2
modeling
2
optical-properties
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Item Type
11
journalArticle
Date
8
2000 - 2010
3
1999 - 1999
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ΑΠΟΘΕΤΗΡΙΟ "ΟΛΥΜΠΙΑΣ"
Σχολή Θετικών Επιστημών
Τμήμα Μηχανικών Επιστήμης Υλικών
Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)
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A new process for the development of hard and stable sputtered amorphous carbon films (Journal article)
A complementary study of bonding and electronic structure of amorphous carbon films by electron spectroscopy and optical techniques (Journal article)
The kinetics of sputtered deposited carbon on silicon: a phenomenological model (Journal article)
Thickness-dependent glass transition temperature of thin resist films for high resolution lithography (Journal article)
In-situ monitoring of the electronic properties and growth evolution of TiN films (Journal article)
Biomolecular layer thickness evaluation using White Light Reflectance Spectroscopy (Journal article)
Real-time monitoring, growth kinetics and properties of carbon based materials deposited by sputtering (Journal article)
A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering (Journal article)
Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films (Journal article)
Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques (Journal article)