Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14078| Title: | In-situ monitoring of the electronic properties and growth evolution of TiN films |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | titanium nitride,ellipsometry,reactive sputtering,grain growth,resistivity,thin-films,texture |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14078 |
| ISSN: | 0257-8972 |
| Link: | <Go to ISI>://000220889900076 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2004-In-situ monitoring.pdf | 122.91 kB | Adobe PDF | View/Open Request a copy |
This item is licensed under a Creative Commons License
