Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14078
Title: | In-situ monitoring of the electronic properties and growth evolution of TiN films |
Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
Keywords: | titanium nitride,ellipsometry,reactive sputtering,grain growth,resistivity,thin-films,texture |
URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14078 |
ISSN: | 0257-8972 |
Link: | <Go to ISI>://000220889900076 |
Publisher: | Elsevier |
Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
File | Description | Size | Format | |
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Patsalas-2004-In-situ monitoring.pdf | 122.91 kB | Adobe PDF | View/Open Request a copy |
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