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Author
6
Logothetidis, S.
6
Patsalas, P.
4
Gioti, M.
1
Charitidis, C.
1
Galdikas, A.
1
Handrea, M.
1
Kautek, W.
1
Kechagias, V.
1
Kehagias, T.
1
Kennou, S.
.
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Subject
3
amorphous carbon
2
amorphous-carbon
2
modeling
2
optical-properties
2
reactive sputtering
2
sputtering
1
a-c-h
1
bn phases
1
carbon nitride
1
chemical bonds
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2004
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2001
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1999
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ΑΠΟΘΕΤΗΡΙΟ "ΟΛΥΜΠΙΑΣ"
Σχολή Θετικών Επιστημών
Τμήμα Μηχανικών Επιστήμης Υλικών
Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)
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A complementary study of bonding and electronic structure of amorphous carbon films by electron spectroscopy and optical techniques (Journal article)
The kinetics of sputtered deposited carbon on silicon: a phenomenological model (Journal article)
In-situ monitoring of the electronic properties and growth evolution of TiN films (Journal article)
Real-time monitoring, growth kinetics and properties of carbon based materials deposited by sputtering (Journal article)
A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering (Journal article)
Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques (Journal article)