Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/15940
Title: Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA
Institution and School/Department of submitter: Πανεπιστήμιο Ιωαννίνων. Σχολή Επιστημών και Τεχνολογιών. Τμήμα Βιολογικών Εφαρμογών και Τεχνολογιών
Keywords: high-energy implantation,channeling,nuclear resonance,fluorine profiling,resonant nra,c-trim,nuclear-reactions,ion-implantation,defect production,heavy-ions,damage
URI: https://olympias.lib.uoi.gr/jspui/handle/123456789/15940
ISSN: 0168-583X
Link: <Go to ISI>://000182039000011
http://ac.els-cdn.com/S0168583X03004488/1-s2.0-S0168583X03004488-main.pdf?_tid=fced648e240081e086af3966e751d0ed&acdnat=1334134424_a8adaed3a13e6093e0944c2e733180b5
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)

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