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Title: Structure and electronic properties of conducting, ternary Ti(x)Ta(1-x)N films
Institution and School/Department of submitter: Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Χημείας
Keywords: ab initio calculations,density functional theory,electron correlations,pulsed laser deposition,tantalum compounds,thin films,titanium compounds,valence bands,time spectroscopic ellipsometry,nitride thin-films,diffusion-barriers,preferred orientation,copper metallization,optical-properties,tan layers,evolution,microstructure,deposition
ISSN: 0021-8979
Link: <Go to ISI>://000266500100105
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά). ΧΗΜ

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