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Author
14
Logothetidis, S.
5
Gioti, M.
2
Valassiades, O.
1
Arvanitidis, J.
1
Dimitriadis, C. A.
1
Hastas, N.
1
Kassavetis, S.
1
Kehagias, T.
1
Kelires, P. C.
1
Komvopoulos, K.
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Subject
7
spectroscopic ellipsometry
7
thin-films
4
contacts
4
density
4
x-ray reflectivity
3
diamond
3
elastic properties
3
optical-properties
3
sputtering
3
stress
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15
journalArticle
Date
10
2000 - 2010
5
1999 - 1999
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ΑΠΟΘΕΤΗΡΙΟ "ΟΛΥΜΠΙΑΣ"
Σχολή Θετικών Επιστημών
Τμήμα Μηχανικών Επιστήμης Υλικών
Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)
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Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films (Journal article)
In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices (Journal article)
A new process for the development of hard and stable sputtered amorphous carbon films (Journal article)
The effect of crystal structure and morphology on the optical properties of chromium nitride thin films (Journal article)
The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films (Journal article)
Insights on the deposition mechanism of sputtered amorphous carbon films (Journal article)
Combined electrical and mechanical properties of titanium nitride thin films as metallization materials (Journal article)
Development of diamond and diamond-related materials with desired properties (Journal article)
Effects of energetic species during the growth of nitrogenated amorphous carbon thin films on their nanomechanical properties (Journal article)
Electronic properties of binary and ternary, hard and refractory transition metal nitrides (Journal article)