Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14046| Title: | In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | titanium nitride,titanium silicide,optical properties,spectroscopic ellipsometry,microstructure,films,contacts,nitride |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14046 |
| ISSN: | 0169-4332 |
| Link: | <Go to ISI>://000086060500042 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2000-In situ and real-time ellipsometry.pdf | 165.9 kB | Adobe PDF | View/Open Request a copy |
This item is licensed under a Creative Commons License
