Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/17340| Title: | Preparation of thin coatings of titanium compounds with ion implantation |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Επιστημών και Τεχνολογιών. Τμήμα Βιολογικών Εφαρμογών και Τεχνολογιών |
| Keywords: | microelectronics,ion implantation,surface technologies,surface engineering,surface coatings,thin coatings,semiconductor compounds,computer simulations,srim ibm software,stopping and range of ions in matter,ti compounds,titanium compounds,ti oxides,titanium oxides,ti nitrides,titanium nitrides,ion beams,irradiation damages,thin films,aes,auger electron spectroscopy,aes depth profiling |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/17340 |
| ISSN: | 0352-9045 |
| Link: | <Go to ISI>://000084579200001 |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| evangelakis-1999-Preparation of thin coatings of titanium compounds with ion implantation.pdf | 339.03 kB | Adobe PDF | View/Open Request a copy |
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