Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/16363
Title: | Dielectric properties of CVD grown SiON thin films on Si for MOS microelectronic devices |
Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Επιστημών και Τεχνολογιών. Τμήμα Βιολογικών Εφαρμογών και Τεχνολογιών |
Keywords: | core-level shifts,electronic-properties,silicon,interfaces |
URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/16363 |
ISSN: | 0268-1242 |
Link: | <Go to ISI>://000220889200011 http://iopscience.iop.org/0268-1242/19/1/008/pdf/0268-1242_19_1_008.pdf |
Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Konofaos-2004-Dielectric propertie.pdf | 126.58 kB | Adobe PDF | View/Open Request a copy |
This item is licensed under a Creative Commons License