Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14454| Title: | Sequential polymer lithography for chemical sensor arrays |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | polymer deposition,photolithography,chemical sensors,vapor sorption,polymer swelling,white-light interferometry,volatile organic-compounds,electron-beam,water-vapor,films,methacrylate),sorption,resist,microsensors,performance |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14454 |
| ISSN: | 0014-3057 |
| Link: | <Go to ISI>://000251625700003 http://ac.els-cdn.com/S0014305707004454/1-s2.0-S0014305707004454-main.pdf?_tid=cf68bf189fdb71e901bf7c6a45644ff2&acdnat=1339662528_15af258000b830796a8e97ebff9ab490 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Beltsios-2007-Sequential polymer lithography.pdf | 582.76 kB | Adobe PDF | View/Open Request a copy |
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