Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14219| Title: | Molecular weight and processing effects on the dissolution properties of thin poly(methyl methacrylate) films |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | poly(methyl methacrylate),thin film,lithography,dissolution,multiwavelength interferometry,electron-beam lithography,polymer-films,multiwavelength interferometry,photoresist dissolution,resist,poly(methylmethacrylate),resolution,nanolithography,fabrication,thickness |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14219 |
| ISSN: | 0167-9317 |
| Link: | <Go to ISI>://000253030100018 http://ac.els-cdn.com/S0167931707003590/1-s2.0-S0167931707003590-main.pdf?_tid=3e9b4d2a84b324b83e33d8026032e690&acdnat=1339662523_b98674714ec07cd7027fce7366efbdd9 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Beltsios-2008-Molecular weight and processing.pdf | 244.08 kB | Adobe PDF | View/Open Request a copy |
This item is licensed under a Creative Commons License
