Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14045
Title: | In situ and real-time ellipsometry diagnostic techniques towards the monitoring of the bonding structure and growth kinetics: silicon oxide coatings |
Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
Keywords: | in situ,real-time,spectroscopic ellipsometry,optical properties,silicon oxide,chemical-vapor-deposition,films |
URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14045 |
ISSN: | 0257-8972 |
Link: | <Go to ISI>://000174011400042 |
Publisher: | Elsevier |
Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Patsalas-2002-In situ and real time.pdf | 142.44 kB | Adobe PDF | View/Open Request a copy |
This item is licensed under a Creative Commons License