Browsing by Author Cardinaud, C.
Showing results 1 to 2 of 2
Title | Author(s) | Issue date | ???itemlist.??? |
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A masking approach for anisotropic silicon wet etching | Normand, P.; Beltsios, K.; Tserepi, A.; Aidinis, K.; Tsoukalas, A.; Cardinaud, C. | 24-Nov-2015 | - |
A new masking method for protecting silicon surfaces during anisotropic silicon wet etching | Normand, P.; Beltsios, K.; Tserepi, A.; Aidinis, K.; Tsoukalas, D.; Cardinaud, C. | 24-Nov-2015 | - |