Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14563| Title: | Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | chemical-vapor-deposition,x-ray-diffraction,weber thin-films,tin films,residual-stress,optical-properties,initial growth,silicon films,real-time,microstructure |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14563 |
| ISSN: | 0021-8979 |
| Link: | <Go to ISI>://000225300800043 |
| Publisher: | American Institute of Physics |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2004-Sur.pdf | 478.87 kB | Adobe PDF | View/Open Request a copy |
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