Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/14414
Title: Real-time monitoring, growth kinetics and properties of carbon based materials deposited by sputtering
Institution and School/Department of submitter: Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών
Keywords: amorphous carbon,sputtering,ellipsometry,modeling,amorphous-carbon,spectroscopic ellipsometry,optical-properties,thin-films,phenomenological model,ion irradiation,roughness
URI: https://olympias.lib.uoi.gr/jspui/handle/123456789/14414
ISSN: 0925-9635
Link: <Go to ISI>://000167483900002
Publisher: Elsevier
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)

Files in This Item:
File Description SizeFormat 
Patsalas-2001-Real-time monitoring.pdf287.72 kBAdobe PDFView/Open    Request a copy


This item is licensed under a Creative Commons License Creative Commons