Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14308| Title: | Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | ab initio calculations,absorption coefficients,band structure,crystal field interactions,density functional theory,electrical conductivity,fermi level,lattice constants,pulsed laser deposition,stoichiometry,tantalum compounds,thin films,atomic layer deposition,delta-tan layers,thin-films,spectroscopic ellipsometry,preferred orientation,electronic-properties,copper metallization,diffusion-barriers,transport-properties,epitaxial-growth |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14308 |
| ISSN: | 0021-8979 |
| Link: | <Go to ISI>://000262225100131 http://link.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000104000012124907000001 |
| Publisher: | American Institute of Physics |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Matenoglou-2008-Optical properties.pdf | 889.89 kB | Adobe PDF | View/Open Request a copy |
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