Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/14197| Title: | Microstructure and nanomechanical and optical properties of single- and multi-layer carbon films synthesized by radio frequency sputtering |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | carbon film,properties,radio frequency sputtering,indentation,x-ray diffraction,x-ray reflectivity,spectroscopic ellipsometry,postgrowth ion irradiation,pulsed-laser deposition,x-ray reflectivity,thin-films,diamond,stability,density,silicon,stress,growth |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/14197 |
| ISSN: | 0257-8972 |
| Link: | <Go to ISI>://000182105100002 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2003-Microstructure and nanomechanical.pdf | 221.79 kB | Adobe PDF | View/Open Request a copy |
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