Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/13889| Title: | Effects of non-depositing energetic species during the growth of boron nitride and amorphous carbon thin films by sputter deposition |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | x-ray photoelectron spectroscopy,energetic species,thermalization subplantation,compressive stress,density,spectroscopy |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/13889 |
| ISSN: | 0257-8972 |
| Link: | <Go to ISI>://000220889900070 |
| Publisher: | Elsevier |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2004-Effects of non-depositing energetic.pdf | 121.83 kB | Adobe PDF | View/Open Request a copy |
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