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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Panayiotatos, Y. | en |
| dc.contributor.author | Patsalas, P. | en |
| dc.contributor.author | Handrea, M. | en |
| dc.contributor.author | Logothetidis, S. | en |
| dc.date.accessioned | 2015-11-24T17:33:43Z | - |
| dc.date.available | 2015-11-24T17:33:43Z | - |
| dc.identifier.issn | 0257-8972 | - |
| dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/13889 | - |
| dc.rights | Default Licence | - |
| dc.subject | x-ray photoelectron spectroscopy | en |
| dc.subject | energetic species | en |
| dc.subject | thermalization subplantation | en |
| dc.subject | compressive stress | en |
| dc.subject | density | en |
| dc.subject | spectroscopy | en |
| dc.title | Effects of non-depositing energetic species during the growth of boron nitride and amorphous carbon thin films by sputter deposition | en |
| heal.type | journalArticle | - |
| heal.type.en | Journal article | en |
| heal.type.el | Άρθρο Περιοδικού | el |
| heal.identifier.primary | DOI 10.1016/j.surfcoat.2003.10.097 | - |
| heal.identifier.secondary | <Go to ISI>://000220889900070 | - |
| heal.language | en | - |
| heal.access | campus | - |
| heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
| heal.publicationDate | 2004 | - |
| heal.abstract | We study the effect of ion irradiation during the growth of boron nitride (BN) and amorphous carbon (a-C) by sputter deposition. We found that the dominant effects for the BN growth are the subplantation of N+ and B+ species. For energies higher than the threshold for Ar+ subplantation, the Ar+ penetrates into BN and disrupts the B-N bonds resulting in defective BN. The existence of Ar impurities in such films promotes the stability of C impurities. These effects result in a very narrow window of ion energy (<40 eV width) where successful growth of BN films may be achieved. On the other hand, in a-C films, sp(3)-bonded C, we found a close correlation between the Ar impurities with the sp(3)-content, which suggests that Ar impurities promote the formation of sp(3)-bonded carbon in a-C, in contrast to BN growth. (C) 2003 Elsevier B.V. All rights reserved. | en |
| heal.publisher | Elsevier | en |
| heal.journalName | Surface & Coatings Technology | en |
| heal.journalType | peer reviewed | - |
| heal.fullTextAvailability | TRUE | - |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Patsalas-2004-Effects of non-depositing energetic.pdf | 121.83 kB | Adobe PDF | View/Open Request a copy |
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