Browsing by Author Tsoukalas, A.
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Title | Author(s) | Issue date | ???itemlist.??? |
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A masking approach for anisotropic silicon wet etching | Normand, P.; Beltsios, K.; Tserepi, A.; Aidinis, K.; Tsoukalas, A.; Cardinaud, C. | 24-Nov-2015 | - |