Browsing by Author Guerin, P.
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Title | Author(s) | Issue date | ???itemlist.??? |
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Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles | Abadias, G.; Koutsokeras, L. E.; Guerin, P.; Patsalas, P. | 24-Nov-2015 | - |