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Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Kitsara, M. | en |
dc.contributor.author | Goustouridis, D. | en |
dc.contributor.author | Valamontes, E. | en |
dc.contributor.author | Oikonomou, P. | en |
dc.contributor.author | Beltsios, K. | en |
dc.contributor.author | Raptis, I. | en |
dc.date.accessioned | 2015-11-24T17:37:25Z | - |
dc.date.available | 2015-11-24T17:37:25Z | - |
dc.identifier.issn | 1454-4164 | - |
dc.identifier.uri | https://olympias.lib.uoi.gr/jspui/handle/123456789/14351 | - |
dc.rights | Default Licence | - |
dc.subject | chemical sensors | en |
dc.subject | polymer deposition | en |
dc.subject | photolithography | en |
dc.subject | vapor sorption | en |
dc.subject | polymer swelling | en |
dc.subject | white-light interferometry | en |
dc.subject | conducting polymer | en |
dc.subject | molecular-weight | en |
dc.subject | films | en |
dc.subject | methacrylate) | en |
dc.subject | lithography | en |
dc.subject | gas | en |
dc.subject | novolac | en |
dc.subject | resist | en |
dc.subject | layers | en |
dc.title | Polymer based chemical sensor array fabricated with conventional microelectronic processes | en |
heal.type | journalArticle | - |
heal.type.en | Journal article | en |
heal.type.el | Άρθρο Περιοδικού | el |
heal.identifier.secondary | <Go to ISI>://000279165400028 | - |
heal.language | en | - |
heal.access | campus | - |
heal.recordProvider | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών | el |
heal.publicationDate | 2010 | - |
heal.abstract | A polymer array fabricated on the same substrate with conventional microelectronic processes is introduced for gas sensing applications. The process is based on photolithographic processes and takes advantage of the balance between UV exposure dose, material tone and developers used. The sensing properties of the lithographically defined films in the array were characterized for various analytes through in situ monitoring of films swelling by white light reflectance spectroscopy. The sensing responses are post processed by Principal Component Analysis and the discrimination between analytes with similar and totally different analytes is presented. | en |
heal.journalName | Journal of Optoelectronics and Advanced Materials | en |
heal.journalType | peer reviewed | - |
heal.fullTextAvailability | TRUE | - |
Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
File | Description | Size | Format | |
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Beltsios-2010-Polymer based chemical.pdf | 308.34 kB | Adobe PDF | View/Open Request a copy |
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