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Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/14235
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dc.contributor.authorVourdas, N.en
dc.contributor.authorKaradimos, G.en
dc.contributor.authorGoustouridis, D.en
dc.contributor.authorGogolides, E.en
dc.contributor.authorBoudouvis, A. G.en
dc.contributor.authorTortai, J. H.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorRaptis, I.en
dc.date.accessioned2015-11-24T17:36:19Z-
dc.date.available2015-11-24T17:36:19Z-
dc.identifier.issn0021-8995-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14235-
dc.rightsDefault Licence-
dc.subjectglass transitionen
dc.subjectthin polymeric filmsen
dc.subjectspectroscopic ellipsometryen
dc.subjectinterferometryen
dc.subjectcoefficient of thermal expansionen
dc.subjectpoly(methyl methacrylate)en
dc.subjectlithographyen
dc.subjectglass-transition-temperatureen
dc.subjectpoly(methyl methacrylate)en
dc.subjectthickness dependenceen
dc.subjectt-gen
dc.subjectsubstrateen
dc.subjectellipsometryen
dc.subjectspectroscopyen
dc.subjectphotoresisten
dc.subjectsurfacesen
dc.titleMultiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric filmsen
heal.typejournalArticle-
heal.type.enJournal articleen
heal.type.elΆρθρο Περιοδικούel
heal.identifier.primaryDoi 10.1002/App.25107-
heal.identifier.secondary<Go to ISI>://000241593700091-
heal.identifier.secondaryhttp://onlinelibrary.wiley.com/store/10.1002/app.25107/asset/25107_ftp.pdf?v=1&t=h3fkdnv5&s=81b182832b0e904e918b7866c13bba8d6dd1e91a-
heal.languageen-
heal.accesscampus-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.publicationDate2006-
heal.abstractMultiple-wavelength interferometry (MWI), a new optical method for the thermal probing of thin polymer films, is introduced and explored. MWI is compared with two standard optical methods, single-wavelength interferometry and spectroscopic ellipsometry, with regard to the detection of the glass transition temperature (T-g) of thin supported polymer films. Poly(methyl methacrylate) films are deposited by spin coating on Si and SiO2 substrates. MWI is also applied to the study of the effect of film thickness (25-600 nm) and polymer molecular weight (1.5 x 10(4) to 10(6)) on T-g, the effect of film thickness on the coefficients of thermal expansion both below and above T-g, and the effect of deep UV exposure time on the thermal properties (glass transition and degradation temperatures) of the films. This further exploration of the MWI method provides substantial insights about intricate issues pertinent to the thermal behavior of thin polymer films. (c) 2006 Wiley Periodicals, Inc.en
heal.publisherWileyen
heal.journalNameJournal of Applied Polymer Scienceen
heal.journalTypepeer reviewed-
heal.fullTextAvailabilityTRUE-
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