Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/14224
Full metadata record
DC FieldValueLanguage
dc.contributor.authorNormand, P.en
dc.contributor.authorKapetanakis, E.en
dc.contributor.authorTsoukalas, D.en
dc.contributor.authorKamoulakos, G.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorVan den Berg, J.en
dc.contributor.authorZhang, S.en
dc.date.accessioned2015-11-24T17:36:14Z-
dc.date.available2015-11-24T17:36:14Z-
dc.identifier.issn0928-4931-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14224-
dc.rightsDefault Licence-
dc.subjectsien
dc.subjectimplantationen
dc.subjectnanocrystalsen
dc.subjectmemoryen
dc.subjectsien
dc.titleMOS memory devices based on silicon nanocrystal arrays fabricated by very low energy ion implantationen
heal.typejournalArticle-
heal.type.enJournal articleen
heal.type.elΆρθρο Περιοδικούel
heal.identifier.secondary<Go to ISI>://000170709600034-
heal.languageen-
heal.accesscampus-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.publicationDate2001-
heal.abstractThe electrical characteristics of Si nanocrystal-based MOS memory devices are studied. The nanocrystals are fabricated into 8-nm thin oxide by very low energy Si+ implantation at different doses and subsequent annealing. TEM work suggests that Si nanocrystals develop at a density, size and perfection that vary strongly with the implanted dose and these structural features are found compatible with the device transfer characteristics. (C) 2001 Elsevier Science B.V. All rights reserved.en
heal.publisherElsevieren
heal.journalNameMaterials Science & Engineering C-Biomimetic and Supramolecular Systemsen
heal.journalTypepeer reviewed-
heal.fullTextAvailabilityTRUE-
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)

Files in This Item:
File Description SizeFormat 
Beltsios-2001-MOS memory devices.pdf96.75 kBAdobe PDFView/Open    Request a copy


This item is licensed under a Creative Commons License Creative Commons