Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/14113
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dc.contributor.authorKitsara, M.en
dc.contributor.authorChatzichristidi, M.en
dc.contributor.authorNiakoula, D.en
dc.contributor.authorGoustouridis, D.en
dc.contributor.authorBeltsios, K.en
dc.contributor.authorArgitis, P.en
dc.contributor.authorRaptis, I.en
dc.date.accessioned2015-11-24T17:35:20Z-
dc.date.available2015-11-24T17:35:20Z-
dc.identifier.issn0167-9317-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14113-
dc.rightsDefault Licence-
dc.subjectembedded microchannelsen
dc.subjectepoxy resisten
dc.subjectuv lithographyen
dc.subjectmicro-channelsen
dc.subjectfabricationen
dc.titleLayer-by-layer UV micromachining methodology of epoxy resist embedded microchannelsen
heal.typejournalArticle-
heal.type.enJournal articleen
heal.type.elΆρθρο Περιοδικούel
heal.identifier.primaryDOI 10.1016/j.mee.2006.01.157-
heal.identifier.secondary<Go to ISI>://000237581900162-
heal.identifier.secondaryhttp://ac.els-cdn.com/S0167931706001031/1-s2.0-S0167931706001031-main.pdf?_tid=29a5a8629e67ef735b7acbfc9ca2885c&acdnat=1339662561_8f52e068d74242340a2dd4a3162b2916-
heal.languageen-
heal.accesscampus-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.publicationDate2006-
heal.abstractA novel layer-by-layer fabrication approach for the manufacturing of long embedded microchannels is presented. The methodology is based on the use of two epoxy based photoresist layers with different photo acid generator (PAG) concentration. Using this methodology long, functional microchannels are demonstrated. The technology has been optimized through tuning of the epoxy molecular weight, PAG concentrations and processing conditions. Finally, a basic microfluidic application is presented. (c) 2006 Elsevier B.V. All rights reserved.en
heal.publisherElsevieren
heal.journalNameMicroelectronic Engineeringen
heal.journalTypepeer reviewed-
heal.fullTextAvailabilityTRUE-
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)

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