Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/13771| Title: | Conducting transition metal nitride thin films with tailored cell sizes: The case of delta-Ti(x)Ta(1-x)N |
| Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
| Keywords: | preferred orientation,copper metallization,optical-properties,evolution,tan,microstructure,contacts,stress,growth,energy |
| URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/13771 |
| ISSN: | 0003-6951 |
| Link: | <Go to ISI>://000258184600019 |
| Publisher: | American Institute of Physics |
| Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Lekka-2008-Con.pdf | 905.33 kB | Adobe PDF | View/Open |
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