Please use this identifier to cite or link to this item:
https://olympias.lib.uoi.gr/jspui/handle/123456789/13544
Title: | The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films |
Institution and School/Department of submitter: | Πανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικών |
Keywords: | grain growth,nano-indentation,sputtering,titanium nitride,x-ray diffraction,tin,contacts,zrn,hfn |
URI: | https://olympias.lib.uoi.gr/jspui/handle/123456789/13544 |
ISSN: | 0257-8972 |
Link: | <Go to ISI>://000085945600061 |
Publisher: | Elsevier |
Appears in Collections: | Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά) |
Files in This Item:
File | Description | Size | Format | |
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Patsalas-2000-The effect of substrate temperature.pdf | 178.81 kB | Adobe PDF | View/Open Request a copy |
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