Browsing by Author Marceau, S.
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Title | Author(s) | Issue date | ???itemlist.??? |
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Thickness-dependent glass transition temperature of thin resist films for high resolution lithography | Marceau, S.; Tortai, J. H.; Tillier, J.; Vourdas, N.; Gogolides, E.; Raptis, I.; Beltsios, K.; van Werden, K. | 24-Nov-2015 | - |