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Koutsokeras, L. E.
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Evangelakis, G. A.
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Lekka, C. E.
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thin-films
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preferred orientation
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coatings
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stress
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copper metallization
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ab initio calculations
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ΑΠΟΘΕΤΗΡΙΟ "ΟΛΥΜΠΙΑΣ"
Σχολή Θετικών Επιστημών
Τμήμα Μηχανικών Επιστήμης Υλικών
Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)
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Texture and microstructure evolution in single-phase TixTa1-xN alloys of rocksalt structure (Journal article)
Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles (Journal article)
Structure, stability and bonding of ternary transition metal nitrides (Journal article)
Optimized pulsed laser deposition by wavelength and static electric field control: The case of tetrahedral amorphous carbon films (Journal article)
On the Nanostructure of Cu in TixCu1-x and TiN/Cu Films: a XAFS Study (Journal article)
Conducting transition metal nitride thin films with tailored cell sizes: The case of delta-Ti(x)Ta(1-x)N (Journal article)
Electronic and crystal structure and bonding in Ti-based ternary solid solution nitrides and Ti-Cu-N nanocomposite films (Journal article)
Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films (Journal article)
Proceedings of Symposium J on Synthesis, Characterization and Advanced Applications of Amorphous Carbon Films, EMRS 2004 Conference, Strasbourg, France, 24-28 May, 2004 - Preface (Journal article)