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Author
10
Logothetidis, S.
9
Patsalas, P.
4
Charitidis, C.
2
Evangelou, E.
2
Konofaos, N.
1
Arvanitidis, J.
1
Galdikas, A.
1
Handrea, M.
1
Karakostas, T.
1
Kautek, W.
.
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Subject
6
amorphous carbon
6
optical-properties
4
density
4
diamond
4
ellipsometry
4
sputtering
3
amorphous-carbon
3
spectroscopic ellipsometry
3
stress
2
a-c-h
.
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Item Type
11
journalArticle
Date
1
2003
3
2001
3
2000
4
1999
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ΑΠΟΘΕΤΗΡΙΟ "ΟΛΥΜΠΙΑΣ"
Σχολή Θετικών Επιστημών
Τμήμα Μαθηματικών
Τμήμα Μηχανικών Επιστήμης Υλικών
Τμήμα Μηχανικών Ηλεκτρονικών Υπολογιστών και Πληροφορικής
Τμήμα Φυσικής
Τμήμα Χημείας
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Electrical behaviour of metal/a-C/Si and metal/CN/Si devices (Journal article)
Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films (Journal article)
A complementary study of bonding and electronic structure of amorphous carbon films by electron spectroscopy and optical techniques (Journal article)
The kinetics of sputtered deposited carbon on silicon: a phenomenological model (Journal article)
Insights on the deposition mechanism of sputtered amorphous carbon films (Journal article)
Crystalline structures of carbon complexes in amorphous carbon films (Journal article)
Development of diamond and diamond-related materials with desired properties (Journal article)
Nitrogen induced states at the CNx/Si interface (Journal article)
Real-time monitoring, growth kinetics and properties of carbon based materials deposited by sputtering (Journal article)
Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques (Journal article)