Please use this identifier to cite or link to this item: https://olympias.lib.uoi.gr/jspui/handle/123456789/14243
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dc.contributor.authorMathioudakis, C.en
dc.contributor.authorKelires, P. C.en
dc.contributor.authorPanagiotatos, Y.en
dc.contributor.authorPatsalas, P.en
dc.contributor.authorCharitidis, C.en
dc.contributor.authorLogothetidis, S.en
dc.date.accessioned2015-11-24T17:36:24Z-
dc.date.available2015-11-24T17:36:24Z-
dc.identifier.issn1098-0121-
dc.identifier.urihttps://olympias.lib.uoi.gr/jspui/handle/123456789/14243-
dc.rightsDefault Licence-
dc.subjectcross-sectional structureen
dc.subjectstress-induced formationen
dc.subjectdiamond-like-carbonen
dc.subjectx-ray reflectivityen
dc.subjectthin-filmsen
dc.subjectmolecular-dynamicsen
dc.subjectelastic propertiesen
dc.subjectintrinsic stressen
dc.subjectelectronic-propertiesen
dc.subjectcompressive-stressen
dc.titleNanomechanical properties of multilayered amorphous carbon structuresen
heal.typejournalArticle-
heal.type.enJournal articleen
heal.type.elΆρθρο Περιοδικούel
heal.identifier.primaryDoi 10.1103/Physrevb.65.205203-
heal.identifier.secondary<Go to ISI>://000176066600049-
heal.languageen-
heal.accesscampus-
heal.recordProviderΠανεπιστήμιο Ιωαννίνων. Σχολή Θετικών Επιστημών. Τμήμα Μηχανικών Επιστήμης Υλικώνel
heal.publicationDate2002-
heal.abstractA possible route toward reducing the intrinsic compressive stress in as-grown amorphous carbon films on Si substrates, with a high fraction of tetrahedral bonding, is by forming multilayered a-C structures composed of layers dense and rich in sp(3) sites alternated by layers rich in sp(2) geometries, a type of an amorphous superlattice. We present here a combined theoretical and experimental effort to investigate the stability, stress, and elastic properties of this type of a-C material. Our theoretical approach is based on Monte Carlo simulations within an empirical potential scheme, while the experimental part consists of spectroscopic ellipsometry, x-ray reflectivity, stress, and nanoindentation measurements in films prepared by magnetron sputtering. Our central result is that the average stress in the multilayered structures is nearly eliminated through layer-by-layer stress compensation, yet the fraction of sp(3) sites in the dense regions remains high, sustained by the overwhelmingly compressive local stresses. The sp(3)-rich layers are stable both against a moderate increase of the width of the low-density layers, as well as under thermal annealing. The elastic moduli of the multilayered films are comparable with those of single-layer films. This, in conjuction with their low stress, makes them suitable for mechanical purposes.en
heal.publisherAmerican Physical Societyen
heal.journalNamePhysical Review Ben
heal.journalTypepeer reviewed-
heal.fullTextAvailabilityTRUE-
Appears in Collections:Άρθρα σε επιστημονικά περιοδικά ( Ανοικτά)

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